Abstract
We created a simple simulation model of transmitted X-rays in polycapillary optics for improved understanding of the transmission characteristics and to aid in the design of the geometrical parameters of the polycapillary optics. New polycapillary optics for a 64-pixel array transition-edge sensor (TES) microcalorimeter energy-dispersive spectrometer system that was installed in a scanning transmission electron microscope (STEM) were developed using the simulation model. The characteristic X-rays that are emitted from the STEM specimen were transmitted and focused on the pixel array TES microcalorimeter by the polycapillary optics. The experimental X-ray transmission characteristics of the manufactured polycapillary optics agreed with the simulated results.
| Original language | English |
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| Pages (from-to) | 758-765 |
| Number of pages | 8 |
| Journal | IEEE Transactions on Nuclear Science |
| Volume | 65 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1 Feb 2018 |