Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano; K. Maehata; N. Iyomoto; K. Yasuda; H. Maeno; K. Shiiyama; K. Tanaka

doi:10.1007/s10909-015-1350-6

Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

A. Takano, K. Maehata, N. Iyomoto, K. Yasuda, H. Maeno, K. Shiiyama, K. Tanaka

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Abstract

Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about , polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

Original language	English
Pages (from-to)	832-838
Number of pages	7
Journal	JOURNAL OF LOW TEMPERATURE PHYSICS
Volume	184
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-015-1350-6
State	Published - Aug 2016

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title = "Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM",

abstract = "Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about , polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.",

author = "A. Takano and K. Maehata and N. Iyomoto and K. Yasuda and H. Maeno and K. Shiiyama and K. Tanaka",

year = "2016",

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doi = "10.1007/s10909-015-1350-6",

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T1 - Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

AU - Takano, A.

AU - Maehata, K.

AU - Iyomoto, N.

AU - Yasuda, K.

AU - Maeno, H.

AU - Shiiyama, K.

AU - Tanaka, K.

PY - 2016/8

Y1 - 2016/8

N2 - Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about , polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

AB - Energy-dispersive spectroscopic measurements are performed using a superconducting transition-edge sensor (TES) microcalorimeter mounted on a scanning electron microscope (SEM) for advanced research at Kyushu University. Because the sensitive area of the TES microcalorimeter is about , polycapillary optics is used to collect the X-rays emitted by the SEM specimen on the TES microcalorimeter. The X-ray transmission efficiency of the polycapillary optics is obtained by analyzing the X-ray energy spectra measured by the TES microcalorimeter. The obtained transmission efficiency of the polycapillary optics is reproduced by the calculated results of the simulation.

U2 - 10.1007/s10909-015-1350-6

DO - 10.1007/s10909-015-1350-6

M3 - 記事

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JO - JOURNAL OF LOW TEMPERATURE PHYSICS

JF - JOURNAL OF LOW TEMPERATURE PHYSICS

IS - 3-4

ER -

Characterization of Polycapillary Optics in a TES Microcalorimeter EDS System Installed on an SEM

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